0.22THz折叠波导慢波结构微细WEDM加工技术-太赫兹科学与电子.PDFVIP

第 12 卷 第 3 期 太赫兹科学与电子信息学报 Vo1．12，No．3 2014 年 6 月 Journal of Terahertz Science and Electronic Information Technology Jun．，2014 文章编号：2095-4980(2014)03-0330-04 0.22 THz 折叠波导慢波结构微细 WEDM 加工技术 刘 俊，周亚军，戴晶怡，向 伟，王亚军，陈 虎 ( 中国工程物理研究院 电子工程研究所，四川 绵阳 621999) 摘 要 ：0.22 THz 折叠波导慢波结构具有尺寸小，刚度低，精确度与表面光洁度要求高，结 构复杂的特点。若采用微数控铣削加工方式，加工产生的应力易造成零件变形。微细电火花线切 割加工技术为无刚性电蚀加工，非常适合慢波结构的微细加工。本文从微能脉冲电源、微细电极 丝、表面质量、表面残余应力等方面，介绍了 0.22 THz 折叠波导慢波结构微电火花线切割加工技 术，实践证明：采用微电火花线切割加工工艺加工出的 0.22 THz 折叠波导慢波结构，经测试满足 了设计要求。 关键词 ：折叠波导慢波结构；微细电火花线切割；表面质量；表面残余应力 + 中图分类号 ：TN124 .2 文献标识码 ：A doi ：10.11805/TKYDA201403.0330 Micro-WEDM technology of 0.22 THz folded waveguide slow wave structure LIU Jun，ZHOU Ya-jun，DAI Jing -yi，XIANG Wei，WANG Ya -jun，CHEN Hu (Institute of Electronic Engineering，China Academy of Engineering Physics，Manyang Sichuan 621999，China) Abstract： The conventional mechanical processing couldn ’t be used in the manufacturing process of 0.22 THz folded waveguide slow wave structure due to its small -scale and low stiffness characteristics. The Micro-Wire cut Electrical Discharge Machining(WEDM) technology suits to the processing of such structure since the macro force between the electrode and workpiece is small in Micro-WEDM processing. The related issues of Micro -WEDM technology in fabricating the 0.22 THz folded waveguide slow wave structure are discussed, including pulse generator with micro energy, micro-electrode, surface quality and residual stress. The practice test indicates that the manuf