Tool or Facility – What Should it Be Reconciling Differences between Production Equipment Needs and.pdf

Tool or Facility – What Should it Be? Reconciling differences between production equipment needs and facility support Hal Amick, Colin Gordon Associates - Presenter Allan Chasey, Arizona State University Michael Gendreau, Colin Gordon Associates Goal of Presentation • Present a substructuring model with which one can simplify between tools and buildings • We can use the model to • define how vibrations (or other contaminant) travel from the outside to the wafer • define how limits at wafer can be worked backward through tool to become requirements for environment • define how ITRS facility and tool teams can interact Notion of “Isolation from Environment” • Most fab processes have one or more aspects of environmental sensitivity • Most tools have some sort of enclosure and/or support system • How might we quantify the manner in which a tool needs to be “isolated” from the room environment? • Where should this isolation “live” – the tool, or the facility? Applications • Tools themselves Contaminants … often are expected to • Vibration mitigate • Noise “contaminants” • EMI • The facility design • Particulates usually attempts to control these • Minienvironments contaminants, as well. • Temperature • Etc. Overview • Is contaminant control the responsibility of the facility designer or tool designer, or both? • If both, how do we coordinate