无水溶胶–凝胶法制备有机–无机杂化光波导薄膜 - Ingenta Connect.PDFVIP

· 606 · 硅 酸 盐 学 报 2011 年 第39 卷第4 期 硅 酸 盐 学 报 Vol. 39 ，No. 4 2 0 1 1 年 4 月 JOURNAL OF THE CHINESE CERAMIC SOCIETY April ，2011 无水溶胶–凝胶法制备有机–无机杂化光波导薄膜 徐真武，剪明明，徐 键，徐清波，孙广清 (宁波大学信息科学与工程学院，浙江 宁波 315211) 摘 要：以二苯基二羟基硅烷(diphenylsilanediol，DPSD)和γ- 甲基丙烯酰氧基丙基三甲氧基硅烷(γ-Methacryloxypropyl trimethoxy silane，MAPTMS)为 前驱体，用无水溶胶–凝胶法合成出有机–无机杂化材料，将其旋涂在硅基片和石英玻璃片上得到杂化光波导薄膜。利用Abbe 折射仪测试薄膜的折射 率，用Fourier 红外光谱仪和Raman 光谱仪测试了薄膜的红外吸收光谱和Raman 散射光谱，用紫外–可见–近红外分光光度计测试了薄膜的光吸收性质， 用棱镜耦合法测试薄膜的光传输损耗。结果表明：控制 DPSD 的加入量可以调节薄膜的折射率(1.471～1.515)；杂化材料在可见和近红外区域的光透 过率在90% 以上；在265 nm 处存在强烈的苯环K 带吸收峰；薄膜的光传输损耗约为1.0 dB/cm 。 关键词：有机–无机杂化；光学薄膜；无水溶胶–凝胶法 中图分类号：TB34 ；TN25 文献标志码：A 文章编号：0454–5648(2011)04–0606–05 Preparation of Organic-Inorganic Optical Waveguide Film by Non-Hydrolytic Sol–Gel Process XU Zhenwu ，JIAN Mingming ，XU Jian ，XU Qingbo ，SUN Guangqing (College of Information Science and Engineering, Ningbo University, Ningbo 315211, Zhejiang, China) Abstract: Organic-inorganic hybrid materials were prepared with diphenylsilanediol (DPSD) and γ-methacryloxypropyl trimethoxy silane (MAPTMS) as precursors by a non-hydrolytic sol–gel process. The hybrid films were deposited on silicon wafers and silica glass substrates by spin-coating. The refractive index, optical absorption or transmittance of hybrid films were measured with an Abbe refractometer and ultraviolet-visible-near infrared spectrometer, respectively. Their Raman and infrared spectra were measured with Fourier infrared and Raman spectrometer. The optical propagation loss of hybrid film was determined by a prism coupled method. The results show that the refractive index of the films can be adjusted by controlling the content o