316L不锈钢表面沉积CrCN薄膜的结构及性能研究 叶育伟1，2，陈颢1 .DOC

316L不锈钢表面沉积CrCN薄膜的结构及性能研究 叶育伟1，2，陈颢1(，王永欣 2，李金龙2，周升国1， （1.江西理工大学材料科学与工程学院，江西赣州341000； 2．中国科学院宁波材料技术与工程研究所海洋新材料与应用技术重点实验室315201） 摘要：利用多弧离子镀技术在316L不锈钢和单晶硅上沉积CrCN薄膜，通过X射线衍射仪(XRD)、扫描电镜(SEM)、X射线光电子能谱仪(XPS)、纳米压痕仪、273A电化学工作站和多功能摩擦磨损试验机等对316L不锈钢及CrCN薄膜的微观结构、力学性能、耐腐蚀性能和摩擦学性能进行表征。结果表明：在316L不锈钢上沉积CrCN薄膜后，硬度从4 GPa提高到22 GPa，H/E和 H3/E2分别从0.022和0.002 GPa提高到0.071和0.11 GPa；阳极腐蚀电位从-0.21 V上升到-0.19 V；在大气，去离子水，海水环境下的摩擦系数及磨损率均显著降低，表现出较优异的综合性能。 关键词： CrCN薄膜；316L不锈钢；微观结构；力学性能；耐腐蚀性能；摩擦学性能 Study on microstructure and properties of CrCN coating on 316L stainless steel YE Yu-wei1.2，CHEN Hao1, WANG Yong-xin2*，LI Jin-long2，，2 (1. School of Materials Science and Engineering, Jiangxi University of Science and Technology, Ganzhou 341000, China; 2a. Ningbo Institute of Material Technology Engineering; 2b.Key Laboratory of Marine New Materials and Related Technology, Zhejiang Key Laboratory of Marine Materials and Protection Technology, Chinese Academy of Sciences, Ningbo 315201, China) Abstract: CrCN coating was deposited on 316L stainless steel and single crystal silicon by Multi-Arc ion plating technique. Microstructures, mechanical performance, corrosion resistance and tribological properties in ambient air, distilled water and seawater were systematically investigated by XRD, XPS, SEM, nano-indentation and ball-on-disc tribol-meter. The results showed that hardness of CrCN coating, deposited on 316L stainless steel, increased from 4 GPa to 22 GPa, H/E and H3/E2 increased from 0.022 and 0.002 GPa to 0.071 and 0.11 GPa, relatively. The anode corrosion potential increased from -2.1 V to -1.9 V, the friction coefficient and wear ratio in ambient air, distilled water and seawater could all be significantly reduced. In other words, the coated 316L stainless steel showed a better comprehensive performance than uncoated one. Key words: CrCN coating; 316L stainless steel; Microstructure; mechanical performance; corrosion resistance; Tribological properties 随着科技的快速发展，对恶劣工况条件下使用的涂层材料性能，特别是在抗磨减摩性能方面提出了更严格的