基于激光干涉仪与自准直仪的平面镜轮廓高精度测量技术pdf.PDF

49 17 Vol.49 No.17 2013 9 JOURNAL OF MECHANICAL ENGINEERING Sep. 2 0 1 3 DOI 10.3901/JME.2013.17.052 * 1 1 1 2 (1. 361005 2. 1138656 ) N 100 mm ±20 nm Zygo TH741 A High-precision Measurement Technique of Flat Mirror Profile Comprising Interferometers and Autocollimator YANG Ping1 ZHU Rui1 GUO Yinbiao1 TAKAMASU Kiyoshi 2 (1. School of Physics and Mechanical Electrical Engineering, Xiamen University, Xiamen 361005; 2. Department of Precision Engineering, The University of Tokyo, Tokyo 1138656, Japan) Abstract An optical scanning technique comprising three laser interferometers and one autocollimator to measure a large flat mirror profile with high accuracy is described. The flat mirror profile and its measurement uncertainty are reconstructed by an application of simultaneous linear equations and least-squares method. The whole measurement process is numerically modeled by the computer simulation. Measurement uncertainties of the flat bar mirror profile are evaluated for different sampling numbers of the flat bar mirror. Moreover, a prototype of optical measurement system based on micro coordinate measuring machine platform is built. The experiment shows that the measurement technique successfully achieves the profile measurement of 100 mm flat mirror and repeatability of measurement accuracy within the range of ±20 nm. Comparing with the results measured by Zygo whitelight interferometer, this technique can