基于LIGA工艺的微齿轮误差特点.pdf

32 4 探 测与控 制学 报 V ol32 N o4 20 10 8 Journal of Detection Control A ug20 10 LIGA 代 俊, 石庚辰 ( , 100081) : , M E M S , : L IG A , , 15 m , : LIG A ; ; : TJ410. 3 :A 2010) 0400 906 Study on Microgears Error of LIGA Processing DA I Jun , SH I Gen gchen ( Beij ing Branch, N atio nal Key Labo rator y o f Electro m ech anical Eng ineer ing and Co ntr ol , Beijing 1000 81, China) Abstract:T he measur em ent and analysis of erro r are of great importance fo r designing m icro gears How ever, in the dom ain of ME M S, ther e ar e no available ref erences about the ch aracteristics of error so f ar A m easuring m ethod w as de signed by ref erring to the traditional scale up m ethod f or gears in w atch and clock By m easuring the param eters like tip circle, root cir cle and tooth thickness, the actual m achining err ors w er e obtained Statistics show ed that the error direc tions of both micro gear s and micro gear shole w ere neg ativ e, and the errors of m icro gears w ere much more than that of m icro g ears hole T he unilateral m argin should be r eserv ed more than 15 m w hen designing complicate hole and shaft Key words:L IGA ; m icrog ear; err or 0 , L IGA MEM S LIGA M EM S( ) , , , V eeco LIGA [ 1] L IGA ( L IGA ) L IGA , , , , 1 LIGA 1 mm[ 2] , , , [ 4] , , 1 [ 3] L IGA