碳纳米管进展与应用.ppt

Interconnect Today chips have become “all wires” Electro-migration failure CNT interconnect High current density Low resistance (6.2k ohm) Ballistic behavior Cont…. SENSORS,NEMS,BIO CNT based microscopy: AFM, STM…CNT tip is robust ,offers amazing resolution. ? Nanotube sensors: force, pressure, chemical… ? Biosensors ? Molecular gears, motors, actuators ? Batteries, Fuel Cells: H2, Li storage ? Biomedical - Lab on a chip - Drug delivery - DNA sequencing Scanning Probe Simulated Mars dust Challenges Selective placement of CNTs Control of diameter, chirality Doping, contacts Novel architectures (not CMOS based!) Large scale production Development of inexpensive manufacturing processes Carbon NanoTube(CNT)Transistor Stanford Model Two set of files: CNFET.lib - CNFET Models. PARAMETERS.lib - Global parameters for the model. To instantiate the devices in the model, the library must be included at the beginning of the SPICE file. ?.lib ‘CNFET.lib’ CNFET CNT Model The model is implemented hierarchically in three levels: CNFET_L1: Level 1, models the intrinsic behavior of MOSFET- like CNFET. CNFET_L2: Level 2, models the device non-idealities (capacitance and resistance of doped S/D CNT region). CNFET_L3: Level 3, models the interface between the CNFET device and CNFET circuits. Substrate G/S/D Metal Gate G/S/D CNT’s CNFET_L3 Substrate CNTFET_L1 Substrate Metal Gate CNT CNFET_L2 Intrinsic CNT channel References You can see animations of virtual nanotubes by following these links: http://www.photon.t.u-tokyo.ac.jp/~maruyama/nanotube.html /cmp/csc/simindex.html You can create your own virtual SWNT at: /steffenweber/JAVA/jnano/jnano.html “Chemical Vapor Deposition.” /1100/CVDwww/cvdinfo.htm “Physical Properties of Carbon Nanotubes.” /cmp/csc/ntproperties/ Carbon NanoTube(CNT)Process Application OUTLINE Introduction History Structure Synthesis Properties Application Challenges References What is CNT? CNT is a t