用于微陀螺性能检测的小型、无干扰真空获得系统.PDF

2000 6 42 VACUUM ELECT RONICS 1 2 高　涛, 金玉丰 ( 1. , 210016; 2. , 100871) A Disturbi ng-Free, Vacuumi zing Mini -System Applied to Measurement f or Micro-gyro 1 2 , - GAO Tao JIN Yu feng ( 1.N anj ing E lectr onic Dev ice I nst itute ,N anj ing 210016, China; 2.I nst it ute of M icr oelectr onics,B e ij ing Univ er sity ,B eij ing 100871, Ch ina) : - Abstract T his a er resents a vacuumizing mini system w hich is com osed of low tem erat ure liquid nitrogen adsor tion um , vacuum gage, sam le chamber and vacuum controller .T he volume of t he syst em is merely 28cm30cm30cm. T he system could su ort the vacuum condition from 10- 2 Pa to several hundreds Pa or more. It could w idely be used in - . the measurement and research for micro gyrosco e and other sensors T he ressure as low as 10- 2Pa in the system can be maintained more than two hours. Keywords: Micro-gyrosco e, Vacuum; M easurement system : - 2 , 28cm30cm 30cm 10 Pa , , 10- 2 Pa , 2 h : ; ; : TF 138: B , , ( MEM S) , MEM S , , , , , : 2000-09-28 6 : 43 Q , , , , , , 1 , : ( 1) , , , ; ( 2) , ; ( 3) , , ; (4) , 1 : 2 N 0. 4 kg , 0. 75 ;