金属离子高温注入原理与工艺研究 - 中国表面工程.pdf

19 2 Vol.19 No.2 2006 4 CHINA SURFACE ENGINEERING Apr. 2006 2 1 * ( , 116024) MEEVAAlAZ31 RutherfordX AZ31 AlAZ31 Al12Mg176 1016 ions ·cm-2 Al 1180 mV(SCE)480 mV(SCE) 1 20 % AlAZ31 TN305.3 A 1007–9289(2006)02–0001–05 Principal and Technology of Metal Ion Implantation at Elevated Temperatures LEI Ming-kai, LI Peng, CHANG Hai-wei, CHEN Tao (School of Materials Science and Engineering, Dalian University of Technology, Dalian Liaoning 116024 China) Abstract: A mass transfer model is built up for metal ion implantation at elevated temperatures based on the transport of ions in solid and the radiation enhanced diffusion theory, and the effective formation heat model is built to predict the intermetallics formation during the ion implantation by introducing. The surface modification of AZ31 magnesium alloy by Al ion implanting at elevated temperature is carried out in a MEVVA 80-10 ion implantation system. The concentration-depth profiles of implanted Al and the microstructure of implanted samples are analyzed by Rutherford backscattering spectrometry and x-ray diffraction, respectively. The calculated concentration-depth profiles and the predicted formation of Mg17Al12 intermetalics are consistent with the measurement results. The AZ31 magnesium alloy samples implanted with an implantation dose of 6 1016 ions ·cm-2 have the highest corrosion potential of 1 180 mV (SCE)and pitting corrosion breakdown potential of 480 mV (SCE). Their passive current densi