支撑光学制造的几何量计量技术.pdfVIP

Vol. 9 No.5 第9 卷第5 期 纳米技术与精密工程 2011 年9 月 Nanotechnology and Precision Engineering Sep. 2011 Dimensional Metrology at PTB to Support Optical Fabrication DAI Gao-liang , SCHUIZ Michael , EHRET Ge时， DANZEBRINK Hans-Ulrich , FLUEGGE Jens , BOSSE Harald (Physikalisch-Technische Bundesanstalt (PfB) , 38116 Braunschweig , Gennany) Abstract: Dimensional metrology is the enabling technology required not only for ensuring the quality of optical products but also for monitoringl controlling the manufacturing processes. Dimensional metrology of micro and nano structures and form metrology of flat , spherical , aspherical , ruled and free form sur- faces are needed. This paper introduced some dimensional metrology research activities at PfB to suppo此 optical fabrication. A metrological large range atomic force microscope ( AFM) wi由 a capable measure- ment volume of 25 mm x 25 mm x 5 mm was introduced for versatile measurements of micro/nano struc- tures. A kind of assembled cantilever probe (ACP) which is applicable for direct and non-destructive sidewall me幽urements w田 presented. A true 3 D AFM using flared AFM probes w描 described by spe- cially developed vector approaching probe (VAP) strategy for true 3D measurements of nano structures. Difference deflectometry and traceable multi sensor (TMS) methods applicable for absolute form metrolo- gy of flat to moderately curved surfaces were detailed. Finally , the challenges in form metrology 缸e dis- cussed and ultra precision CMMs applicable for form meω町ements are i