超外差干涉绝对距离测量研究综述张存满.pdf

1 No. 1 1998 1　　　　　　　　　　　　　 OPTICAL TECHNO LOGY　　　　　　　　　　　　　 Jan. 1998 张存满　赵　洋　李达成 (, 100084) 　: ,。, ,。 。 () ,, 。, ,。 : , Super-Heterodyne Absolute Distance Interf erometry: An Overview Zhang Cunman　Z hao Yang　Li Dacheng ( Tsinghua niversity Beijing, 100084) Abstract: Absolute distance measurement based on multiple wavelengths interferometric theory has been progressing greatly in recent years. It has been demonstrated that super-heterodyne absolute dis- tance interferometry ADI is effective to overcome some system errors that cannot avoid in common( ) heterodyne interferometers, such as mode coupling caused by optical elements, and can perform real time phase measurement of the syntheticwavelength easily. In this paper, we brief the basic principle of multiple wavelengths ADI that is also called fractional fringe measurement. As the essential part, we - , relate and analyze the principle of super heterodyne interferometry and therefrom we point out its some unique advantages. Finally we introduce three super-heterodyne ADIs whose synthetic wavelengths are obtained by two fixed lasers, two tunable lasers and one diode laser combined with optical fibers respec- tively. We also explain their merits in actual measurement. : , - Keywords absolute distance measurement super heterodyne interferometer 　　、　 , 。 。 [2、 3] 。 : 、