电容传感器摘要（Capacitor sensor summary）.doc

电容传感器摘要（Capacitor sensor summary） With the rapid development of science and technology, precision detection technology has been more and more widely used. Especially, with the development of modern industry, the displacement detection technology is developing towards the direction of high precision, large range and multidimensional displacement. At the same time, it is required that the detection system can realize real-time and on-line measurement. At present, one-dimensional line displacement measurement has been able to reach more than millimeter range, nanometer resolution, but there are many shortcomings, such as small range, multidimensional displacement measurement, many systems, high system costs. With the increasing demand for two-dimensional displacement direct detection, it is of great significance to study low cost, good performance, high precision and large displacement measurement system with Cheng Erwei displacement. Based on the self-developed planar capacitance sensor, the related research is carried out. The basic principle of displacement measurement based on capacitive sensor, designed structure of the planar capacitance sensor two dimensionaldisplacement measurement, the large range and high precision planar capacitive sensor with two dimensionaldisplacement measurement method based on the developed two dimensional displacement measurement prototype system decoupling. The main research contents of this paper are as follows: the first chapter reviews the ultra precision displacement detection technology at home and abroad research status quo and development trend, introduces the new requirements of the development of modern science and technology of ultra precision displacement detection technology, analyzes the existing problems, puts forward the main research content research purpose, significance and the. The second chapter introduces the basic principle of detecting displacement capacitance sensor, the large range and high precision planar ca