微型磁通门工艺的研究.PDF

35 3 V ol135 No13 2 0 0 3 3 JO U RN AL O F HA RBIN IN ST IT U T E OF T ECH NO LO GY M ar . , 2003 1 1 1 1 1 1 2 游余新 , 王东红, 陈伟平, 王 蔚 , 兰慕杰 , 王喜莲 , 于 杰 ( 1. M E M S , 150001 2 . , 15000 1 ) : 为了制备体积小重量轻的可用于航天方面的微型磁传感器, 用微机械加工方法制备了微型磁通门 片. 重点研究用蒸镀和掩膜电铸两种途径制备微型磁通门磁 的工艺, 研究了不同电铸工艺参数( 镀液中 c ( Fe2+ ) / c ( Ni2+ ) 比电流密度pH 值) 对镀层组份的影响并获得较为理想的成分比. 利用振动样品磁强计 测得磁 材料的磁滞回线表明电镀的磁 性能优于蒸镀的. : M E M S 微型磁通门 真空镀膜 掩膜电铸 : T P2 12 . 13 : A : 0 367- 62 34 ( 200 3) 03- 038 1-04 Research for technology of mi cro magnetic fluxgate 1 1 1 1 1 1 2 YOU Yu- x in , WAN G Dong- hong , CHEN We-i p ing , WA NG W ei , LA N M u-j ie , WA NG Xi- lian , YU J ie ( 1. M EM S Cent er , Harbin Instit ut e of T echnology , Hrbin 15000 1, C hina 2. M easurement Cent er , Harbin Instit ute of T echnology , Hrbin 15000 1, China) Abstract: In order to get mag netic sensor w it h micro volume and w eight used in sp aceflight , the micro- magnet ic f luxgate h as been fabricat ed by micromachining . T he evaporating and plat ing technology of fabri- 2 + 2 + cat ion m agnet ic core has been mainly researched . Inf luences of some paramet ers ( t he rat e of CFe / CN i , current den sit y and pH) on component of plat ing magnet ic core ( N iFe) h ave been t ested and perfect com- ponent w as gained. F rom t w o hyst eresis loops it can be seen t hat magnet ic core charact eristic is good by plat ing t h an evaporat ion . Key words: MEM S micro- magnetic fluxg at e evaporat ion