基于labview软件的音圈电机驱动系统模型辨识方法.pdf

·· 基于 LabVIEW 软件的音圈电机 驱动系统模型辨识方法 (上海交通大学 机器人研究所，上海 200240) 音圈电机是一种广泛应用于 IC 装备的高精度驱动元件，具有小惯量，高频响，以及收敛快的控制特性。本文采 用理论推导和试验辨识相结合的方法研究了音圈电机的控制模型，详细介绍了运用 LABVIEW 软件对音圈电机系统进行 系统辨识的方法，其中包括参数辨识中最小二乘法的基本原理，激励信号施加和响应信号的数据处理以及模型辨识算法 的Labview 程序编制，并对辨识的模型进行了验证。结果对研究 IC 封装过程的高精度控制算法有重要的参考价值。 模型辨识；高速高精度；音圈电机；运动控制 TP13 A 1006 0316200702 0029 04 The system identification approach of Voice Coil Motor driving system based on labview software LUO Jian-qiangZHANG Wei-jun (Shanghai Jiao Tong University，Shanghai 200030，China) Abstract The Voice Coil Motor (VCM)which characterized as small inertiahigh frequency response and fast convergence is widely applied in high precision motion control in IC Packaging device. In this paperan integration approach of theory analysis and experimental identification is presentedand the process of model identification of voice coil motor with Labview software is introduced in detail. It includes the basic principle of Least Square in parameter identificationdata processing of the stimulus and response signalthe Labview programming on model identification arithmetic and model verification. The result of this paper is valuable for the research of high precision control arithmetic in the IC packaging. Key words system identification high precision Voice Coil Motor motion control LabView (Wire Bonding)IC PTP25