利用计量型原子力显微镜进行纳米台阶高度测量.pdf

6 4 Vol.6 No.4 2008 7 Jul 2008 1 1 2 2 3 2 2 1 1. 300072 2. 100013 3. 100084 9 x 2nm 8 1nm 1.5nm PH7111672-6030200804-0288-05 Step Height Measurement by theM scope CHEN Zhi1GAO Si-tian 1 2LU Ming-zhen 2 3DU Hua 2 CUI Jian-jun 2 HU Xiao-tang 1 1.State Key Laboratory of Precision Measuring Technology and InstrumentsTianjin UniversityTianjin 300072China 2.Division of Metrology in Length and Precision EngineeringNational Institute of Metrology Beijing 100013China 3.Department of Precision Instruments and MechanologyTsinghua UniversityBeijing 100084China The metrological atomic force microscope consists of the scannerposition sensor for cantilever and the inte- grated miniature three dimensional laser interferometric system.In this paperthe interferometric system was used as refer- ence standard to realize value traceability in nanoscale. The calibration model of scanner including 9 main error items of scanner was established and used in the calibration of scanner of atomic force microscope based on the measurement of inter- ferometer. The results show that the residual error of all other 8 items is no more than 1nmexcept that the position error in x direction is no more than 2nm after calibration. The standard calculation me