3d active stabilization system with sub-micrometer resolution3 d与sub-micrometer决议主动稳定系统.pdfVIP

3D Active Stabilization System with Sub-Micrometer Resolution 1. 2. 1 ¨ ¨ ¨ 2 Olli Kursu , Tuomas Tuukkanen , Timo Rahkonen , Mikko Vahasoyrinki * 1 Department of Electrical and Information Engineering and Infotech Oulu, Electronics Laboratory, University of Oulu, Oulu, Finland, 2 Department of Physics, University of Oulu, Oulu, Finland Abstract Stable positioning between a measurement probe and its target from sub- to few micrometer scales has become a prerequisite in precision metrology and in cellular level measurements from biological tissues. Here we present a 3D stabilization system based on an optoelectronic displacement sensor and custom piezo-actuators driven by a feedback control loop that constantly aims to zero the relative movement between the sensor and the target. We used simulations and prototyping to characterize the developed system. Our results show that 95 % attenuation of movement artifacts is achieved at 1 Hz with stabilization performance declining to ca. 70 % attenuation at 10 Hz. Stabilization bandwidth is limited by mechanical resonances within the displacement sensor that occur at relatively low frequencies, and are attributable to the sensor’s high force sensitivity. We successfully used brain derived micromotion trajectories as a demonstration of complex movement stabilization. The micromotion was reduced to a level of ,1 mm with nearly 100 fold attenuation at the lower frequencies that are typically associated with physiological processes. These results, and possible improvements of the system, are discussed with a focus on possible ways to increase the sensor’s force sensitivity