MEMS触觉传感器课程设计.doc

厦门大学 课程设计 一种用于机器人指尖的微型触觉传感器 A Micro-Tactile Sensor Used in Robot Fingertip 2011 年 7 月 摘 要 本文针对目前机器人触觉传感器研究的现状，提出了一种用于机器人指尖的微型触觉传感器，其拥有独特的传感单元阵列排布，优化的结构性能。本文主要完成以下工作： （1）用于机器人指尖的触觉传感器中传感单元的阵列排布设计。基于结构矩阵分析和材料力学原理，构建了传感单元在轴向和横向负载下的机械力学模型；建立了传感单元的应力检测灵敏度与传感单元结构参数之间的关系；基于压阻检测理论，建立了压阻阻值变化率和传力杆外加负载之间的数学关系；并提出了传感单元敏感梁 12 压阻排布方式，设计计算了压阻单元的敏感方向、类型、结构尺寸等内容； （2）研究了传感单元结构参数对传感单元性能的影响机理，详细讨论了敏感梁、传力杆、中心连接体各个结构参数对传感单元应力检测灵敏度、线性、平滑度的影响。建立了传感单元基于有限元的数值模型，模拟仿真了传感单元的应力分布。同时结合上述几个方面的理论研究成果，基于标准参数下的传感单元性能，根传感单元参数对性能影响的程度，设计传感单元各单元最优化的结构形式和结构参数，并对模拟仿真其应力分布，模态分析； （3）研究了加工过程中有关压阻、KOH腐蚀等关键工艺，制定了工艺流程并设计了制造版图。 关键字：机器人 ，指尖，MEMS，触觉，压阻，传感器，Ansys  ABSTRACT This paper develop a micro-tactile sensor used in robot fingertip based on the current study on the robot tactile sensor .It has a unique sensor unit arrangement and optimized structure properties.The follow is the main contents of this paper: 1. The sensor unit array arrangement of fingertip tactile sensors for robots is built. Based on structure matrix analysis and material mechanical theory, a mechanical module of the sensor unit is presented. The stress distribution of beam, stiffness, sensitivity, and linearity of the unit are calculated. Relationship between load of transitive pillar and stress distribution of piezo-resistors is set up. Meanwhile, 3D analytical module of piezo resistors is presented. Stress distribution of beam is analyzed. The direction, type, number, arrangement and dimension of piezo resistors are designed. 2. Through the ANSYS Finite Element Method, the stress distribution, stiffness are simulated. For the consideration for MEMS technics implement, methods and equipments about position and alignment between stylus and intermediate are presented, and precision assembly with self-alignment and self-position is achieved. Compared with the sensor unit performance of standard parameters, according to the influence degree of structure parameters of beam, intermediate body, and stylus, optimum structure and parameter