平面度误差的测量及数据的处理.pdf

内蒙古工业大学专业综合设计说明书 摘 要 平面度是指基片具有的宏观凹凸高度相对理想平面的偏差。平面度误差是将被测 实际表面与理想平面进行比较，两者之间的线值距离即为平面度误差值。因此,对平 面度误差的测量与评定，在工程实际中显得格外重要。本文介绍了平面度误差的几种 测量方法，并且主要介绍了平面度误差的评定方法,提出了采用旋转法、电算法进行 数据处理，从而计算出平面度误差。结合实例,建立合理的数学模型，利用MATLAB R2014b 软件强大的数值计算分析和绘图功能，从而得出最精确的平面度误差测量与 数据处理方法，进而可以知道旋转法对于平面度数据处理的优良效果。 关键词：平面度误差;测量方法;数据处理;MATLAB Abstract Flatness is refers to the substrate with the macroscopic bump height deviation of relative ideal plane.Measured the actual surface flatness error is compared with ideal plane, the line between the two distance is the planeness error value.Therefore, the flatness error of the measurement and evaluation, seem particularly important in the engineering practice.This paper introduces several measurement methods of flatness error, and mainly introduced the flatness error evaluation method, put forward the study.this method, electric algorithm is adopted to improve the data, and the flatness error is calculated.Combined with examples, to establish a reasonable mathematical model, using R2014b software MATLAB powerful numerical analysis and mapping function, thus it is concluded that the most precise flatness error measurement and data processing method, then can know good effect of study.this method for flatness data processing. Key words: the flatness error; Measurement methods; Data processing; MATLAB 内蒙古工业大学专业综合设计说明书 目 录 第一章 绪论 1 第二章 平面度误差的MATLAB 程序设计及分析2 2.1 设计思路之一（旋转法）2 2.1.1 旋转法设计理论基础2 2.1.2 程序流程图 3 2.1.3 编写MATLAB 程序4 2.2 设计思路之二（电算法设计） 5 2.2.1 电算法 5 2.2.2 设计思路 5 2.2.3 程序流程图 6 2.2.4 编写MATLAB 程序 6 2.3