谐振式微机械加速度计设计的关键技术＊.pdf

第21卷第4期 传感技术学报 v01．21No．4 CHINESE OFSENSORSANDACTUATORS 2008年4月 JOLrP矾AL Apr．2008 Critical in of Resonant Micromechanicai TechnologiesDesign REN Lu-da Jie’，FAN Shang-chun，WANG Instrument 100083，China) (Schoolof Sci棚ceOpto-electronicsEngineering，BeihangUniversity，BeOing resonant sta— Abstract：Micromechanicalaccelerometerhasthe ofdirect advantagesfrequencyoutput，high studiesthemechanicsofmicromechanicalresonantaccelerometer， bility，andhighprecision．Thispaper andcreatesthemathematicalmodelofthefirst-levelstructure．1everstructureandthesecond-level sensing structure．Wealso thatthe ofthemeasurementofthe accel— sensing explain keytechnique highsensitivity erometeristhe ofthe resonatorandthe beam，themass，the mechanisms， design bearing proof leverage and astructureofmicromechanicalresonantaccelerometer．Atlast．the andthe propose optimumdesign theemulationofthestructureare the resonantfre— resultof achieved，and indexesare：the performance is98858 valueis the is24．52 quency Hz，theQ 673．9，andsensitivityHz／g。． words：MEMS；micromechanicalresonant Key accelerometer；resonator；modeling E]巳垃C：2575；7320E 谐振式微机械加速度计设计