半导体制造设备.pdf

半导体制造装置 支撑IC产业发展的基石 Mark Ding, TOKYO ELECTRON (SHANGHAI) LIMITED Lihung Chen, TOKYO ELECTRON LIMITED 2014/09/25 Contents • Recent Chinese Market and Technology Challenge • State-of-the-art WFE Technology • Outlook of the New Era • Summary Mark Ding / TOKYO ELECTRON (SHANGHAI) LIMITED / Rev.03 / 2014/09/18 TEL-MKT-14056 Lihung Chen / TOKYO ELECTRON LIMITED 2 Recent Chinese Market and Technology Challenge 未来蓝图离不开全球IC产业链的持续贡献 Hierarchy of The Semiconductor Industry Electronics US$1,493B IP Fabless Semiconductor US$316B IDM, Foundry OSAT WFE Wafer Fab Equipment US$27B OSAT:Outsource Assembly and Test Mark Ding / TOKYO ELECTRON (SHANGHAI) LIMITED / Rev.03 / 2014/09/18 TEL-MKT-14056 Lihung Chen / TOKYO ELECTRON LIMITED 4 IT Industry TEL™’s WFE Business Total Number of Tools Delivered by TEL™ 70000 60000 50000 Busicom 40000 Made in Japan (First application) 1971 ~ 30000 4004 1994 ~ 2.3 K transistors 20000 10 micron DX4 2012 ~