电子光学入门-表面分析研究会SASJ.PDF

13 () 196-8558 3-1-2 kato@jeol.co.jp 2009 4 12 TEMSEMSTEM Introduction to Electron Optics for the Study of Energy Analyzing Systems (13) M. Kato JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558. kato@jeol.co.jp (Received: April 12, 2009) This final chapter describes several aspects of electron optics and its application to electon spec- troscopy. An energy-filtering imaging system is presented in the first section. Such a system is realized by incorporating an energy analyzer in a conventional electron microscope, but some crucial optical conditions are required as compared with those in a spectrometer or microscope. Next theme is the equivalence of the optical systems of TEM, SEM, and STEM, which is shown by the theorem of reciprocity. The last section introduces several techniques of numerical calculation for the design of electron optical systems. X 13 13.1 13.2 13.3 TEM SEM