准分子雷射加工Excimerlaserablation-iBrarian.PDF

工程光學 準分子雷射加工 Excimer laser ablation 0 工程光學 Introduction to a Laser •Definition - Light Amplified Stimulated Emission of Radiation. - A device which generates or amplifies light. - Formal name for laser physics: quantum electronics. •Properties of Laser Beams - Monochromatic: single wavelength. - Directional: low divergence. - Intense: high power density. - Coherent: same phase relationship. Source: A. E. Siegman, “Lasers”, University Science Books, Mill Valley, California, Chapter 1 (1986) 1 1 工程光學 History of the Laser stimulated emission: idea in 1916 (A. Einstein) maser (microwave amplification by the stimulated emission of radiation) : in 1953 (C. H. Townes) ruby: in 1960 (T. H. Maiman) He-Ne: in 1961 (A. Javan, W. R. Bennett, Jr., D. R. Herriott) Nd glass: in 1961 (L. F. Johnson, K. Nassau) GaAs: in 1962 (GE, IBM, MIT) Nd: YAG: in 1964 (J. E. Geusic, H. M. Marcos, L. G. Van Uitert) + Ar : in 1964 (W. B. Bridges) CO : in 1964 (C. Kumar, N. Patel) 2 chemical (HCl): in 1965 (J. V. V. Kaspar, G. C. Pimentel) dye: in 1966 (P. P. Sorokin, J. R. Lankard) copper vapor: in 1966 (W. T. Walter et al.) excimer: in 1976 (Naval Research Laboratory) 2 Source: J. Hecht, “The Laser Guidebook”, 2nd Edition, McGraw-Hill, Inc., California, Chapter 2 (1992) 工程光學 Absorption and Emission absorption