ESD和TCAD仿真.ppt

共163页 ESD与TCAD仿真 报告人：浙大微电子 崔强 Welcome! 热烈欢迎各位参加本次讲座的学员。由于本人水平有限，在座的各位如果有什么问题，请立刻打断我。 Welcome! 本次讲座分3个小节，中途有两次休息，欢迎大家和我探讨。 单元1：TCAD简介 单元2：ESD的TCAD仿真简介 单元3：ESD的仿真评价体系 单元1 1.1：TCAD总体简介 1.2：Tsuprem4/Medici 1.3：Athena/Atlas 1.4：Dios/ Dessis （ISE-TCAD） 1.1：TCAD总体简介 TCAD－Technology Computer Aided Design Tsuprem/Medici（Avanti，被Synopsys收购） Athena/Atlas（Silvaco公司） Dios/Dessis（Ise公司，被Synopsys 收购） 1.2：Tsuprem4/Medici Tsuprem4/Medici是Avanti公司的二维工艺、器件仿真集成软件包。Tsuprem4是对应的工艺仿真软件，Medici是器件仿真软件。在实践中，可以将Tsuprem4的工艺仿真的结果导入到Medici中，从而进行较为精确的仿真。 1.2 .1：Tsuprem4 CAPABILITIES TSUPREM-4 simulates silicon IC process fabrication Ion Implantation Epitaxial growth Diffusion Oxidation of silicon and polysilicon Etching and deposition Silicidation of silicon and polysilicon SPECIFICATIONS Two-dimensional Supports up to 40,000 nodes Written in C COMMAND INPUT LANGUAGE The input language is made up of commands and corresponding parameters There is only one command per line The line can be up to 80 characters long. If it s longer, we can continue in the next line, but the last character in the previous line must be a “+” character. TYPES OF COMMANDS There are two types of commands Declaration (used to set parameters) Action (execution – used to perform a process step) PARAMETERS There are three types of parameters Numerical (e.g. temp=1000) Logical (e.g. clear) Character (e.g. “NMOS3A”)  FILES ASSOCIATED WITH RUNNING TSUPREM-4 SIMULATIONS Input file (*.inp) Output file (*.out – appended automatically by program) TSUPREM-4 structure file (*.str) MEDICI/DAVINCI file (*.dev) Universal (TIF) format file (*.tif) CREATE A SIMULATION Setting up the initial grid Models and coefficients (method) Process statements (deposition, expose, develop, etch, implant, diffusion, epitaxy) Electrical calculations in TSUPREM-4 Extracting results (Non-electrical) from TSUPREM-4 1.2 .2：Medici Features： Medici solves Poisson’s equation and the current continuity of electrons and holes in two dimensi