准分子激光技术发展_邀请论文_准分子激光技术发展_邀请论文_.pdf

37 9 V ol. 37 , N o. 9 2010 9 CHINESE JOURNAL OF LASERS September, 20 10 : 0258- 7025( 2010) 09- 2253- 18 准分子激光技术发展 ( ) * 余吟山 游利兵 梁 勖 方晓东 ( , 2300 31) , , ; ; ; T N 24 8. 2 A doi: 10 . 3788/ CJL20 10 3709 . 2253 Progress of Excimer Lasers Technology (Invited Paper) Yu Yinshan You Libin Lian Xu Fan Xiaodon ( An hui In stitu te o Opt ics an d Fin e M echa nics , Chinese Aca dem y o S ciences , He ei , Anhu i 23003 1, China ) Abstract The fundamental characteristics of excimer are introduced briefly and the historical development of excimer lasers is reviewed. The pro ress of excimer technolo y especially for dischar e pumped excimer lasers is presented detailedly. The key technolo ies recently employed to improve the performance of excimer lasers for litho raphy are analyzed. The applications of dischar e pumped excimer lasers in industry, medicine and scientific research are also discussed. Key words lasers; excimer lasers technolo y; dischar e pump; litho raphy 1 ; [ 1] ; ; , 1970 H . G . Bosov ; Xe2 , 40 , ; , , 2 [ 2, 3] , 2. 2007 3. 99 , , 2009 1. 35 , , - [ 5] ( ) , ex cimer