Plasma Surface Engineering Innovative Processes And Coating Systems For High Quality Products Elsevier英文电子书.pdf

Surface and Coatings Technology 112 (1999) 351–357 Plasma surface engineering — innovative processes and coating systems for high-quality products R. Suchentrunk *, H.J. Fuesser, G. Staudigl, D. Jonke, M. Meyer Daimler Chrysler Research and Technology, P.O. Box 800465, D-81663 Munich, Germany Abstract The paper will inform about new results in research into and the application of plasma-assisted processes such as reactive magnetron sputtering, plasma CVD, plasma cleaning and activation, and plasma diusion treatment. Typical examples from selected industrial areas will give an impression of the wide application-potential of these innovative techniques. Examples will include the deposition of wear and chemical-resistant coatings on lightweight polycarbonate glass for cars, tribological coatings on motor and gear components, plasma cleaning and activation of aerospace components, and the fabrication of high-temperature- resistant coating systems for various applications. © 1999 Elsevier Science S.A. All rights reserved. Keywords: Coating systems; High-quality products; Plasma surface engineering 1. Plasma — a versatile tool for cars, tribological coatings on motor and gear compo- nents, plasma cleaning and activation of aerospace Plasma-assisted processes enjoy an increasing applica- components, and the fabrication of high-temperature- tion potential in industry. They are vital for microelec- resistant coating systems for various applications. tronics and tool fabrication, functional coatings on glass and plastic foils, the cleaning and activation of plastic c