Breakthrough Chemical Analysis of HMDS英文电子书.pdf

Published Febuary 2008 Technical noTe Breakthrough Chemical Analysis of HMDS Reveals a Solution for the Prevention of Lens Hazing Donaldson proves that advanced layering technology and BSMmax filters most effectively remove TMS, NH and HMDSO. 3 OBjeCtive: Kevin Seguin, Andrew Dallas and Gerald Weineck Donaldson Company, Inc. To identify the most effective solution for lens hazing by gaining the industry’s most in-depth understanding of the HMDS to TMS/HMDSO chemistry In recent years as the industry has moved from 248 nm lithography process in ambient air. tools to higher powered 193 nm tools, a new and costly problem emerged for semiconductor processors: molecular contamination on COnCLuSiOn: the optics (lens hazing). Because progress in one area almost always prompts new concerns in another, Donaldson has applied its more It is necessary to focus on the than 90 years of filtration expertise to learn more about this problem hydrolysis products of HMDS to ensure adequate removal of volatile siloxane and discover the breakthrough solution. With so much at stake— compounds. We have shown that the costly lens replacement along with lost time and productivi