KEITHLEY讲座3.ppt

Hardware configuration (1) Device Characterization/Parametric test DC I-V 4200-SCS Series 2600 SMU Series 2400 SMU Series 230 SMU Switch Matrix 707A/708A switch mainframe 7072A/7174A matrix cards Hardware configuration (2)SMU per pin for high speed production and WLR High speed parallel test High accuracy measurements Utilizing TSP engine on Series 2600 SMU for parallel test Probers supported Alessi Cascade Alessi 6100 Summit 12000 series S300 Micromanipulator 8860 or any compatible semiautomatic probers Suss PA 200/300 Tokyo Semitsu (TSK) TSK A-PM-60/80/90 TSK UF 200/3000 TEL TEL P8/P12 TEL 19S EG 2001/2010 4080/4090 6000 Automated Characterization Suite (ACS)Improve productivity with easy software Test plan development execution at the device, site, wafer, and cassette level Full GUI operation including interactive test mode Wafer map and description utility Semi and fully automatic prober support Test Flow ACS Hardware Config Flow on PC for 2600 Operating environment Operating System: Windows XP Pro Installed on PC CPU: Pentium 4 2.4GHz+ or equivalent System Memory (RAM): 1GB Hard Disk: 200M free space Graphics Card: 16MB of VRAM Minimum Display: Minimum 1024x768, “32-bit True Color” GPIB supported: KPCI488, KPCI488A, KPCI488LP,KUSB488A 4200-SCS Pentium 4 CPU, 1GB memory External monitor preferred KTEI 6.0 or above Programming Environment - C C programming on 4200 or PC Additional requirements Visual Studio VC or .NET Keithley User Library Tool (KULT) Needed for writing test algorithm on 4200, external instrument via GPIB and RS232 Open environment Programming environment - TSP TSP script is an embedded test script executed on 2600 firmware It reduces GPIB communication time, increase flexibility and improve execution speed Script editor directly embedded in STM window (Script Test Module) Wafer Level Reliability Option Reliability option WLR libraries Device Reliability HCI NBTI Fast measure NBTI (require 2600 SMU) NBTI On-The-Fly NBTI Pulse On-The-F