基于光电集成传感器的电场测量研讨.pdf

基于光电集成传感器的电场测量研究 曾 嵘，陈未远，梁曦东，何金良，牛彝 (清华大学电机工程与应用电子技术系，北京100084) T丑匝ELECTRICFIELDM哐ASEARE^Ⅱ￡NTBASEDONTHE玎恤GRATED OPTICALELECTRICSENSoR Ben ZengRong,ChertWeiyuan．LiangXidong,HeJirdiang，Niu ofElectrical (DepartmentEngineering,rsinghLiaUniversity,13eijing100084,China) ABSTRACT：There辑somcaSintensive llCt证S,suela special signal,fineinsulation,hi曲speedr,sspon蹁谢dcfrequaaey smallsizein band’and themcasurl釉entofeleelriefiel凼inthercseardawork ordertOlllCet ofhi01voltageengineering．In 也嚣c demands we他almost before traditional novel Sl戏ial simultaneously,whichimpossiblebyusing method,a optical clcetrie cleetriefield9缸∞rWaS inthis three tlac i．tc粤atcd introduced柚d嘶l印脚tcdpaper．Firstly,theg,衄eratio,of oftheelectric丘eldmeasurement the taaditional develooment w笛introdue缸Seeonckdlataet懿of clcetric丘eld mcastucmcnt nOVCImcasurem锄tmethodbased effect medaods锄d onelectro-opticwa屯corollatedbriefly．Third,也c ofindividualdevicesmeasur蜘ac．ntbasedon effcetandthenovelmeasurement disadvantage optical system eleetro-o砸c basedOn electric and ofthenovel $y$1呛111 integral sensor懈nlr-z缸netheoryimplmmtation optical design optical electric electricfield．辩．nsor basedonthe ofthesllucture and of i．tcgratccl w讹inu蜘删carefully