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[工学]北航材料微结构及测试课件-a18
Scanning Electron Microscopy
1930
(TEM)
1935 Knoll
(SEM)(STEM,
100mm )
1938 Von Ardenne
SEM--
50 mm
1942Zworykin. Hillier,
-
- 50 nm
- : , ,
: SEM !
1948C.W. Oatley,
SEM
Ardenne(TEM)
SEM
1942, ZworkinSEM .
1965SEM.
SEM1942 50nm
0.5nm.
SEM , X- ,
,,
First Modern SEM
constructed by D.
McMullan in the
Cambridge University
Engineering
Laboratory in 1951.
Source: Electron
Optics and Electron
Microscopy, P.W.
Hawkes.
Electron Gun
Vacuum pumps
The first commercial scanning electron microscope
High Resolution Field Emission
SEM
n now a oo ns e e
SEM….
SEM-Scanning Electron Microscope (or microscopy)
TEM- Transmission Electron Microscope
AEM- Analytical Electron Microscope
STEM- Scanning Transmission Electron Microscope
EPMA-Electron Probe MicroAnalyzer
SPM-Scanned Probe Microscope (STM, AFM)
To see a VIRTUAL SEM, go to the following link:
/primer/java/electronmicroscopy/magnify1/index.htm
SEM images have a natural 3D
look
SEM images have a natural 3D
look
A simple SEM image-what is it?
SEM
SEM
SEM
Vacuum
Vacuum
• Why?Electron Mean
Free
Path requires at least 10-
3 Torr
• Electron source life
• W filament ≥ 10-4 Torr
• LaB6 filament ≥ 10-7
Torr
• Field Emission ≥ 10-10
Torr
How do we achieve a
good vacuum?
• Mechanical roughing
pump
backing a diffusion pump
• Liquid nitrogen cold trap
• Turbo molecular pump
• Ion getter pump
**Note: Vacuum most
Electron Gun
• Filament
• Filament
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