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脉冲偏压电弧离子镀CrN薄膜的表面形貌和性能研究英文
Vol130No111JournalofSouthwestUniversity(NaturalScienceEdition)Nov12008文章编号:167329868(2008)1120014206SurfaceMorphologyandPropertiesofCrNCoatingDepositedbySuperimposedPulse3BiasCathodicArcIonYANGJuan,WENXiao2xia,DepositionLUChun2can,CHENZhi2qian,NIEChao2yinSchoolofMaterialScienceandEngineering,SouthwestUniversity,Chongqing400715,ChinaAbstract:Inthisstudy,thecathodicarcionplatingtechniquewasusedtodepositCrNfilmsonstainlesssteelsub2strates.ThemechanicalpropertiesofthecathodicarciondepositedCrNfilmswerecorrelatedtothemicrostructureofthefilms,whichinturnwasdeterminedbythevacuumarcdepositionparameters.Thegoalofthisstudywastoexaminetheeffectsofbiasvoltageonthesurfacemorphology,phasestructure,microhardnessandwearresistanceofCrNfilms.Variousstandardcharacterizationtechniquesandequipment,suchasX2raydiffraction,ball2on2discfrictiontester,surfaceprofilometer,scanningelectronicmicroscopy,microindentionsystemandopticalmicroscopy,wereusedtoanalyzeandqualifythesurfacemorphology,themechanicalandtribologicalproperties.Withincreasingesubstratebiasvoltages,thenumberofmacroparticlesdecreased.TheCrNcoatingspreparedat-100Vshowedsmoothsurfaces,finecrystallinegrainsandhighhardnessandwearresistance.Keywords:CrN;substratebiasvoltage;surfacemorphology;propertyCLCnumber:TB43;TG1741444Documentcode:ACrNfilmshavebeenstudiedintensivelyfornearlythreedecadesduetotheirhighlyattractiveproper2ties.Thesefilmsshowexcellentpropertiesincludinglowfrictioncoefficients,goodwearresistance,excel2lentchemicalstabilityandfavorableoxidationresistance[1,2].TheCrNfilmtechnologyhaspromisingap2plicationsinconfectioningprocess,surfacemodificationsand/orhightemperatureenvironment[3].ManyresearchhavebeenconductedtostudygrowthandpropertiesofCrNfilmdepositedbyCVDandPVDmethods[4].TheCVDprocessesusemetalprecursorssuchasTiCl4[5]andTitaniumisopropoxide[6],whicharedissociatedbythermalactivation,andreactonthesubstratesurface.Thistechniqueisalreadywelles2tablishedinindustrialapplications.Itsdisadvantage,however,isthatthetemperature
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