纳米TiO_2薄膜的制备与表面形貌研究_孟凡明.pdf

28 1 72 CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY 2008 12 TiO 2 1, 2* 1 1 1, 2 孟凡明 周明飞 蔡 琪 孙兆奇 ( 1. 230039; 2. ( ) 230039) Growth and Surface Morphology of Nano-TiO Films 2 1, 2* 1 1 1, 2 Meng Fanming , Zhou Mingfei , Cai Qi , Sun Zhaoqi ( 1. School of Physics and Materials Science, Anhui University, H ef ei 230039, China; 2. Key Laboratory of O to-electronic Inf ormation Acquisition and Mani ulation, (Anhui University) , Ministry of Education, H ef ei 230039, China) Abstract Surfa e morphology of TiO films,grown by RF magnetron sputtering on Si substrate and annealed at dif- 2 ferent temperatures,were hara terized with X-ray diffra tion( XRD) , atomi for e mi ros opy( AFM) and X-ray photo- ele tron spe tros opy( XPS) .The results show that the annealing temperature signifi antly affe ts its mi rostru tures. For instan e, annealed below 400 e , the film is amorphous; however, at annealing temperatures of 400 e or 600 e , anatase and rutile omes into being, respe tively. At an annealing temperature higher than 1000 e , anatase phase turns into rutile phase ompletely.As annealing temperature rises up from 400 e to 1000 e , the grain size grows and the surfa e rough- ens, but turning around at 1000 e abruptly, possibly be ause of the phase transition. Keywords TiO t