胶印工艺外文文献.pdf

Thin Solid Films 647 (2018) 57–63 Contents lists available at ScienceDirect Thin Solid Films journal homepage: /locate/tsf Fabrication of replica cliché with fine pattern using reverse offset printing T process a,b a b,⁎ a,⁎ Yejin Shin , Inyoung Kim , Dongho Oh , Taik-Min Lee a Department of Printed Electronics, Korea Institute of Machinery Materials, 156, Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, South Korea b Mechanical Engineering, Chungnam National University, 99, Daehak-ro, Yuseong-gu, Daejeon 34134, South Korea A R T I C L E I N F O A B S T R A C T Keywords: Among the printing processes for printed electronic devices, the gravure offset and reverse offset methods have Cliché drawn attention for their fine pattern printing potential. These printing methods use a cliché, which has a Replica decisive effect on the precision and quality of the final product. In this research, a precise cliché replica method Cliché replication is proposed. It consists of copper (Cu) sputtering, precise reverse offset printing with a 5-μm pattern width, Reverse offset printing nickel‑cobalt (Ni-Co) electroplating, rinsing, etching, and diamond-like carbon (DLC) coating. C