samnscreport_v_final_ncku-国立成功大学机构典藏.pdf

料力 980129 �…NSC 立料 �… �Atomic Force Microscope, AFM … �Tip-Sample interaction … �Si N … 3 4 �Diamond like carbon … [1-3] �Self assembled monolayers, SAM … �Critical Dimension, CD … AFM SEM TEM Abstract Wear of probe tips is a critical issue during the use of atomic force microscope (AFM) in metrology and surface characterizations. The tip-sample interactions during AFM scanning result in adhesion and friction (also known as stiction) that, consequently, cause the increase of tip radius or damage of sample or more likely, a mix of both. Change of tip apex shape during AFM measurements reduces image resolution, introduces measurement uncertainty and scanning artifacts; ultimately, it shortens the lifetime of an AFM probe. Past studies have suggested hard materials having abrasion resistance and/or soft materials having hydrophobicity as candidates for wear-resistant coatings on AFM probe tips [1-3]. Among the soft materials, self-assembled monolayer (SAM) materials have attracted attentions for their ultrathin and conformal coating characteristics that are essential for special AFM applications such as Critical Dimension (CD) metrology measurements. In this study, we continued our prior study of wear-resistant coat