课件下载 - progress in rd of cvd diamond films and the strategy_精品.ppt

Diamond based ISFET Diamond Drain Source Epoxy Diamond Drain Source Epoxy V G Reference electrode Diamond Drain Source Epoxy Diamond Drain Source * Personal (home), clinical and hospital health care and Continuous monitoring of disease and treatment * 金刚石膜产业化现状及发展趋势 * 金刚石膜产业化现状 工具与摩擦磨损应用 电子学应用 光学应用 热学应用 探测器与传感器 电化学应用 高保真扬声器金刚石振膜 CVD金刚石单晶 其它 * * Diamond film coated drills, endmills and inserts SemiCon SP3 * Commercial CVD System for Diamond Cutting Tools CemeCon Company * * 热学应用 高功率激光二极管阵列热沉 MCMs 金刚石基片 功率半导体器件金刚石封装 LCD LD背光 * 问题?? 性能价格比: 金刚石膜与其它材料的连接 来自其它材料的竞争: SiC AlN Diamond/Cu composite * 光学应用 高超音速导弹窗口和头罩 工业高功率CO2激光窗口 高功率微波窗口 * * ITER聚变堆，将使用金刚石窗口和中子探测器 * Atlas Alice * 863计划 自然科学基金 创新基金 产业化 国内研究和产业化进展情况 * Present level of research for freestanding diamond films Tool Grade: Size：F120mm maximum Thickness: up to 2mm Fracture strength: ? 300MPa （as measured by three point bending method） Thermal grade: Thermal conductivity: from 8W/cm.k to 18W/cm.k Optical grade: Size: up to F60mm (F120mm possible by the end of June 2005) Thickness: up to 1.5mm Optical properties: Fully transparent from 0.22mm to mm wavelength microwave Mean transmitivity between 8 to 12 mm: ~70% ~87% (With oxidation resistant antireflection coatings) Thermal conductivity: ? 16W/cm.k (20W/cm.k maximum) Fracture strength: ≧ 300MPa Oxidation resistance: after exposure to laboratory air at 800℃ for 180s, the decrease in transmitivity in 8～12 mm wavelength range is less than 3% Resistant to 950℃ for 30s with a maximum transmission of 85% with coatings Dielectric loss at 5GHz: ～8x10-4 at 35GHz: ～3.6x10-4 Laser damage threshold: Pulsed YAG laser (1.06 mm, 10ns): 6～7 J/cm2 (6～7 x108 W/cm2) Continuous wave CO2 laser: 115～226 kW/cm2 * * F60mm x 0.8mm双面抛光样片数据 * CVD金刚石拉丝模