基于表面等离子激元的金属薄膜微结构的研究-光学工程专业论文.docx

浙江大学硕士论文的剥离带来困难，以及占空比过高时光栅表面粗糙度也会增大，实际样品的光学特性明显偏离设计结果。最后，对整个课题进行了总结，并提出了今后需要进一步研究和发展的方向。关键词:金属薄膜结构:表面等离子激元:亚波长金属狭缝:光栅11浙江大学硕士论文AbstractSurfaceplasmonpolaritonsisexcitedstateofevanescentwave，whichislocalizedinthesurface ofametalbytheinteractionoffree-electronsandph创ons.Throughthesubwavelengths阳C阳mmodulationinthe surfaceinnanoscale，itcancontrolwavefield alongthesurface，particularlythecontrolofitsinteractionwith1ight.Ithastremendouspotentialapplicationsinthenanotechnologyare眉such臼nano-photonicdevices，integratedoptoelectronicchipsandsooninthefuture，thusith描at位actedthebroadattention.Inthispaper，theresearchfocusedontheone-dimensionallinearmetalthinfilmmicrostructureandtransmissionmetallic gratingswithverynarrowanddeepenoughslits，includingexplorationsinexperimentFirstaccordingtoprincipleofsurfacepl出monwave (SPW) ，itcanonlypropagate alongtheinterfaceoftwomaterials，andthe组npli阳dedecaysexponentiallywiththepe叩endiculardistancetotheinterface.BasedonthecoupledwavepropagatedepthdSpandpropagate distance Lsp ofdifferentmetalmaterials，theselectcriterionfordevicematerialhasbeenpresentedandsilverhasthebestcharacteristicsandisthemost suitablematerialsforsubwavelengthdevice.Throughthefinitedifferencetimedomain(FDTD)me伽od，wesimulatedthepropagationcharacteristicoflightwaveinsub-wavelengthslitdevicesurroundedbyperiodicgratingcorrugationsfortheppolarizedGaussianbeamofwavelength632.lnm脑血example.Ithasbeenprovedthattransmissionenhancementandselιcollimationphenomenainsuchdevicecanbeachieved.Amongthem，the gratinginincidencesurfacemakes acontributiontothetransmissionenhancement，and thatinexitsu由cea能ctsonfar-fielddistributionofintensity.ηleeffectofthenumberofdentedgroovesinthegratingontransmissionenhancementislimited，andtherelationbetweentransmissionintensityand sub-wavelengthslitdepthhasperiodicity.Thesestruc阳reparametersfordesignphotonicdevicesareverylmportant.Becauseof thee他ctofsurfacepl出monswave，slit withsymmetricgratingcanrealizesymmetricdi曲action，and出ymmetricstructurewithspecialdesigncanac