日本超流FC-5000_TG-F995-0E.pdf

Two in One Design FC-5000 series Controller with ultrasonic flow converter for small flow OUTLINE FCA-5000 is a hardware that has both func- tions of controller and signal converter for ultrasonic flow meter. So far, the flow control in low flow rate and small line needed flow meter, signal con- verter for flow meter, controller and control valve. By combining two functions into one hard- ware, the following advantages are realized: 1) Space saving 2) Improvement of controllability 3) Reduce electrical noise effects 4) Simplify wiring As FC-5000 has the same features of FCA-3000 and SFC-700, this instrument is used together with FCV-1000S or FCV-3000 series control valve and UCUF flow sensor series, of which all wetted materials are made of PFA. Since then, an applying FC-5000 can configure the control loop suitable for corrosive services and/or fluid containing bubbles or particles, Asuch as the services in wet process and CMP of semiconductor industries. FEATURES 1) Space saving The case size is the same of SFC-700, i.e., half of the controller and the converter. 2) Improvement of controllability Eliminating signal conversion to standard signal (4-20mA) reduces delay in time and improves controllability. 3) Reduce electrical noise effects from outside Eliminating signal wiring between the converter and the controller, noise effects from outside is reduced. 4) Simplify wiring By combining two into one, external wirings for flow signal and electric power become not necessary. 5) Other features coming from SFC-700 and UCUF • Measure slurry or fluid containing bubbles by DSP technology • High accuracy : +/- 1.0 % of Reading (Flow velocity 1 m/s) • Wi