COG操作人员手册(公司内部培训资料).ppt

第4章.错误报警及解释 PRE 10. Chip not found on chip loader slider slider 1 suction 380 Cause :although chip suction was detected the chip was not found on the slider (the suction sensor remains off) Measure :check the suction sensor and chip if the suction sensor remains off even though the slider suction-grips a chip adjust the sensor and select {retry} if a chip is not found or has been taken out select {remove} Retry: re-checks the chip suction status Remove: resumes operation assuming that the chip has been taken out 第4章.错误报警及解释 PRE 11. Suction sensor on time-out chip hand2 suction 386 Cause :the suction sensor did not turn off the specified suction check time Measure :check the object to be suction-gripped and whether the suction sensor Is on or off .if the object is attached and the suction sensor is on select (retry) If the object is not attached or operation cannot be resumed select (remove) Retry: resumes from the suction sensor input status check Remove: removes the substrate when the object is a substrate . if the object is not a substrate ,operation resumes assuming that there are no objects left 第4章.错误报警及解释 PRE 12. Chip not found at chip reversing section pst-revers1 suction 563 Cause :the is no chip held in suction by the chip loader inverter (suction sensor is off) Measure :check the suction sensor and chip .if the suction remains off even though the hand suction-gripping a chip adjust the sensor and select (retry) If a chip is not found or has been taken out select (remove) Retry: re-checks the chip suction status Remove :resumes operation assuming that the chip has been taken out 第4章.错误报警及解释 Main Teflon tape out cause: run out of teflon tape measure: place the tape again if the tape is normal ,check the input on/off state in the manual mode retry :resumes the operatio