Fθ扫描物镜设计与研究.doc

目 录 摘 要 II Abstract III 1 绪论 1 1.1 引言 1 1.2 国内外研究现状与发展趋势 2 1.3 研究内容 4 1.4 研究的目的与意义 4 2 f-θ透镜的工作原理 5 2.1 f-θ透镜与普通透镜的区别 5 2.2 f-θ透镜的特点及成像特点 6 3 f-θ镜头的设计思想 8 3.1 f-θ镜头基本原理 8 3.2 f-θ透镜的参数要求 9 3.2 结构及象质要求 10 3.3 f-θ透镜设计实例 14 4 系统扫描线性改善方法 23 5 结 论 20 致 谢 27 参考文献 28 F-θ扫描物镜的设计与研究 摘 要 随着激光应用技术的发展，出现了形形色色的以激光为光源的光学系统。F-θ扫描物镜是广泛用于激光打印系统、激光测径系统中的一种特殊光学系统。激光扫描监测系统是一个动态光学系统，想要获得微米级的测量的精度，就必须采用具有良好动态特性光学系统，一般采用F-θ透镜作为扫描发射光学系统，能够很好得解决这一问题。F-θ透镜被广泛地应用于红外，激光等扫描系统中，同时对F-θ透镜在整个视场内改善是扫描性提出越来越高的要求。区别于普通透镜，F-θ扫描物镜的像高，这样在像面上形成线性的扫描速率。为此，需要设计一个负畸变（桶形畸变）的光学系统。 本设计基于F-θ透镜的原理和特性，根据其特性决定其结构参数。使用ZEMAX软件，设计一个F-θ透镜实例。对其结果进行分析优化。总结校正F-θ透镜线性失真的办法。 关键字：F-θ透镜； 线性； 负畸变 Research and Design for F-θ Scan lens Abstract F-θ scan lens is widely used in laser printing systems, laser diameter measurement system, a special optical system. With the application of laser technology, there all kinds of laser light source of optical systems. It used to observe or record the image itself in different forms of traditional optical system, the emergence of laser can be transformed into practice, the image sequence signal and the spatial spectrum to handle or record, so laser optical system with traditional optical systems differ, the types of range. Laser scanning monitoring system is a dynamic optical system, want to get micron measurement accuracy, it must have good dynamic characteristics using optical system, generally use the F-θ lens as a scanning optical system launch, may solve this problem are well . F-θ lens is widely used in infrared and laser scanning system, while F-θ lens improvements in scanning the entire field of view of increasing demands put forward. Different from the normal lens, F-θ scan lens of as high as the plane in the formation of such a linear scan rate. Therefore, we need to design a negative distortion (barrel distortion) of the optical system. The design is based on F-θ lens of the principles and characteristics, according to their characteristics to determine the