半导体设备的人机界面SEMI-E95标准.pdfVIP

SEMI E95-1101 (Reapproved 0307) SPECIFICATION FOR HUMAN INTERFACE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT This standard was technically approved by the global Information Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. It was available at in February 2007 and on CD-ROM in March 2007. Originally published February 2000; previously published November 2001. 1 Purpose 1.1 This standard addresses the area of processing content with the direct intention of developing common software standards, so that problems involving operator training, operation specifications, and efficient development can be resolved more easily. 1.2 This standard is written to be “tool-neutral” without reference to, or reliance on, specific capabilities of platforms or operating systems. Neither is it intended that choices of software tools or detailed implementation strategies be dictated. 1.3 Note that all figures in this standard are schematic, are not drawn to scale, and unless otherwise specified, are not intended to provide implementation details about number of buttons, button sizes, panel sizes, etc. 2 Scope 2.1 This standard specification applies to manufacturing equipment used in the production of semiconductors. 2.2 This standard may be applicable to other areas such as the manufacture of flat panel displays, but specific application to these areas is outside the scope of this document. NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or othe