《微结构气体传感器的电极设计与有限元仿真》-毕业论文.doc

摘要 PAGE 3 摘要 本文旨在设计一种微结构气体传感器，使得当器件经加热达到气敏材料的正常工作温度时，整个传感器所需功耗最小。 首先介绍的是三明治结构电极形状的微型传感器，再通过尝试对多种不同排版步行的加热电路温度场的有限元分析，改进设计，得出一种新型的低功耗气体传感器，其高温部分主要分布在中间区域，基本覆盖敏感材料区，进一步对加热电极和信号电极的形状，电极的材料，基底厚度，电极宽度和间距设定，为进一步降低功耗提供参考。 通过ansys有限元分析软件，对其稳态热传导，磁场等方面进行理论分析，并结合实验探索，通过理论与实验的多次反复来达到设计目的。而在实际情况中，还要受到工艺的可行性及复杂的外界条件，器件行为等众多因素的影响。 关键字 气体传感器； ansys有限元分析；功耗；微热板； Abstract Abstract This paper aims to design a micro-structure gas sensor. So when the device is heated to normal operating temperature of sensing materials. The minimum power is required by the sensor.  First introduced the shape of the micro electrode sensor is the sandwich structure . Then try different layout of the heating circuit on foot finite element analysis of temperature field , and improving design, draw a new low-power gas sensor . The high temperature part of the main locates in the middle region, covering areas of sensitive materials . Further designing the shape of the heating electrode and signal electrode, the electrode material, substrate thickness, electrode width and spacing setting provide reference to further reduce power consumption.  Through finite element analysis software ansys , we can explore its steady-state heat conduction, the magnetic field and other aspects of theoretical analysis combined with experiments . we can achieve purpose of the design through theoretical and experimental repeatedly. And in reality, it is effected by the complicated process of feasibility and external conditions, the device behavior, and many other factors.  　　 Key words　Gas sensor；Finite element analysis software ansys；Power； Micro hot plate； TOC \o 1-3 \h \z \u 目录 目录 摘要 Abstract 目录 HYPERLINK \l _Toc293609482 第一章 绪 论 PAGEREF _Toc293609482 \h - 1 - HYPERLINK \l _Toc293609483 1.1 气体传感器的分类 PAGEREF _Toc293609483 \h - 1 - HYPERLINK \l _Toc293609484 1.2 气体传感器的研究意义 PAGEREF _Toc293609484