基于VI的载流子迁移率测试系统的研制-材料物理与化学专业论文.docxVIP

中文摘要 载流子的迁移率是半导体材料的重要特性参数。通过对迁移率的测量，可以准确掌 握不同材料的电输运特性。因此，方便、准确地测量半导体载流子的迁移率，对半导体 的研究和生产都具有重要的意义。 随着科学技术的进步，出现了新的测试仪器——虚拟仪器。虚拟仪器是基于计算机 的测试平台，具有交互式的图形界面。由计算机、应用软件和硬件组成，通过软件把计 算机硬件资源和仪器硬件有机融为一体。本文介绍了虚拟仪器的发展和 LabVIEW 相关知 识。 本文分析了几种传统的测量半导体载流子迁移率的方法和仪器。针对传统方法和仪 器存在的测试条件苛刻、精度不高、设备昂贵等缺点，文中根据线性增压载流子瞬态谱 这一原理，以 LabVIEW 为平台设计了一种半导体载流子迁移率测试系统。详细介绍了 该系统各部分的硬件组成，详细论述了系统软件的各功能模块的设计和实现方法，其中 包括线性增压控制模块、数据采集、数据存储与回放等功能模块。 最后，对该半导体载流子迁移率测试系统进行了调试和测试实验，并对测试结果进 行了分析。实验结果表明，所研发的测试系统，运行稳定，使用简单方便，具有良好的 数据保存、回放及数据图形显示功能，同时软件具有参数设置灵活，可二次开发的优点, 具有一定的实用价值和发展前景。 关键词：虚拟仪器；LabVIEW；CELIV；迁移率 Abstract Carrier mobility is one of the most important characteristic parameters of semiconductors from which the electron transport property of materials can be obtained. Therefore, the measures of the carrier mobility are very important for the research and production of the semiconductor materials. With the development of science and technology, a new kind of instrument called virtual instruments appears. A virtual instrument is a system with interactive graphic interfaces based on computers. It consists of a computer, application softwares, and instrument hardwares. Its development, reflected by one of the famous products, LabVIEW, will be introduced briefly. In this paper, several traditional testing methods and instruments for the carrier mobility are introduced and discussed. To solve the problems such as low accuracy, rigorous requirements and high cost coming from the traditional instruments, a measure system is developed for the carrier mobility according to the method of carrier extraction by linearly increasing voltage (CELIV), regarding LabVIEW8.60 as a design platform. The circuits of various components are introduced. The design method and realization of measure system are discussed in detail, which include the linearly increasing voltage control, the data acquisition, the data storage, the data redisplay, and so on. Finally, the system debugging and testing for the measure system, as well as