基于VME总线的多处理器运动控制卡-机械电子工程专业论文.docxVIP

Abstract Ultra-precision motion control is one of the most important technologies in lithography. With the research of national key project Hardware of Dual stage Motion Control System Development, the research and practice of multi-processor motion controller base on VME bus has been developed. In this thesis, the requirement of ultra-precision dual stage motion contrl has been analyzed, the relationship between various subsystems in the process of lithography movement has been considered. After comparative analyzed common computer bus, such as ISA bus, PCI bus and VME bus; and compared the advantages and disadvantages of the microprocessor that applicatied for industrial control: MCU, ARM, DSP, FPGA, etc. the overall structure of the motion control card based on VME bus and with DSP+FPGA core has been established; the various functional modules respect to the specific functional requirements of motion control card have been described briefly. The hardware details based on the overall structure of motion control card have been designed, such as: DSP peripheral circuits, FPGA external circuits, VME bus interface circuits, high-speed optic fiber circuits, digital and analog IO circuits, power supply systems for motion control card. Also, the software architecture based on the hardware circuit has been established, used the flexibly reconfigurable and highly integrated FPGA to design the hardware interface layer software, such as: VME slave interface logic, custom bus interface logic, high-speed fiber-optic controller and analog IO controller, etc. DSP unified manage the controller in FPGA through its external memory interface, which formed the DSP+FPGA core processor architecture. Meanwhile, the motion controller achieved FLASH boot, application layer code downloaded from the host computer, management software, etc, in DSP. Finally the integrity and stability of motion controllere has been verigied on the system Debugging platform. Targeted for ultra-precision dual