FeSi系非晶半导体膜及团簇模型解析.docx

优秀毕业论文 精品参考文献资料 Fe—Si系非晶半导体薄膜及团簇模型解析 Fe—Si系非晶半导体薄膜及团簇模型解析 Semiconducting amorphous Fe—Si films and the interpretation using the Cluster Model Abstract The semiconducting amorphous Fe-Si films have the performance approximating to crystalline phase 13-FeSi2 at room temperature．It is a low-cost，high-efficiency photovoltaic material．The semiconducting amorphous Fe-Si films Can not only avoid the limitation of composition and preparation of 13·FeSi2，but also avoid the problem of film-substrate interface mismatching in silicon-based technology applications．It can be synthesized by using more economical techniques and compatible with silicon IC technologies．In additions．it has a potential application as compared with amorphous silicon．Furthermore，amorphous Fe．Si films consider to be a promising semiconductor material in amorphous materials．which iS expected to be applied to the various devices applications such as：silicon-based optoelectronic devices，solar cells and near infrared detector． The short-range ordering in the amorphous phase determines the final performance．But there are no systematic studies on the composition range of amorphous Fel oo呵SiT films corresponding to semiconducting performance and Iocal structure．This iS essential for the preparation and rational use of amorphous Fel 00．_Six films．Moreover，with the adding of M elements in the Fe-Si binary system，it can not only improve the amorphous formation ability． but also expand the scope of its ingredients．Therefore，it increases the flexibility of applications ofamorphous Fel00吖Six thin films． In the present paper，Fel00吖Si工(x=30．3-1 00 at．％)and Fe．Si．M(M=Mn or C)temary amorphous films were prepared on single crystal Si(1 00)and A1203(000 1)substrates by magnetron sputtering RF magnetron CO—sputtering，and were analyzed for composition， microstructure，optical band gap，crystalline phase，resistivity and stability．The relationship between the composition of amorphous Fe．Si films and the local structure was dete姗