大口径光学组件面形检测系统关键算法研究-计算机工程与应用.PDF

Computer Engineering and Applications 计算机工程与应用 2011 ，47 （20 ） 163 大口径光学组件面形检测系统关键算法研究 1 1 1 1 2 2 2 2 张隽楠 ，范 勇 ，陈念年 ，王俊波 ，袁晓东 ，程晓峰 ，徐 旭 ，刘 楠 1 1 1 1 2 2 2 2 ZHANG Junnan ，FAN Yong ，CHEN Niannian ，WANG Junbo ，YUAN Xiaodong ，CHENG Xiaofeng ，XU Xu ，LIU Nan 1.西南科技大学 计算机科学与技术学院，四川 绵阳 621010 2.中国工程物理研究院 激光聚变研究中心，四川 绵阳 621900 1.Department of Computer Science and Technology ，SWUST ，Mianyang ，Sichuan 621010 ，China 2.Research Center of Laser Fusion ，CAEP ，Mianyang ，Sichuan 621900 ，China ZHANG Junnan ，FAN Yong ，CHEN Niannian ，et al.Study on key algorithm in large optical components topography measurement system.Computer Engineering and Applications ，2011 ，47 （20 ）：163-166. Abstract ：In the large optical components topography measurement system ，the accuracy of measurement is greatly related to laser spot segmentation ，centroid extraction and back surface spot removal.As the great difference in multi-spots ’light in- tensity ，a twice-segmentation method is proposed to locate the region of the laser spots efficiently.Compared the stability of the algorithms for laser spot ’s extraction ，a gray-gravity method is chosen.A feature based classification method is proposed to discriminate the spots which are reflected by front surface of optical component.Experimental results demonstrate that these algorithms can extract laser spots accurately ，stably and classify laser spots efficiently.Also ，they are used in optical components topography measurement system successfully. Key words ：optical components topography measurement ；laser spot ；twice-segmentation ；centroid extraction ；discrimination of front reflected laser spot 摘 要：大口径光学组件面形检测系统中，激光光斑的分割、质心提取和背表面光斑的自动剔除算法关系到系统的检测精度。针 对系统中多路光斑光强差异比较大的现象，提出了两次分割法，有效定位各光斑区域；通过比