基于外光反馈干涉的微小振动测量研究-通信与信息系统专业论文.docxVIP

西南交通大学硕士研究生学位论文 西南交通大学硕士研究生学位论文 第lI l页 Abstract According to the fast development of the MEMS and meticulous processing technology,the study of microvibration accurate measBrement has been attented increasingly．External optical feedback interference technology has the wide application foreground in the mierovibration measulcment．External optical feedback interference system is very simple，compact and easy alignment．It’S a good solution to the problems of complexity,huge size and sensitive alignment that are typical of conventional interferometers．External optical feedback interference technology becomes research hot． The uniform external optical feedback interference mathematical theoretics model is getted from the Long-Kobayashi rate equations and three-mirror F-P cavity approach．Especialy under the condition of the external reflector producing microvibration,the mathematical theoretical model of external optical feedback interference based on the mierovibration is established．And a new method of microvibration measurement based on the external optical feedback interference is proposed．which is called reconstruction measurement method．The main studies have been carried out as following： (1)The basic characteristics of external optical feedback interference have been simulated and analyzed．It includes the influence of feedback phase Oil the system’s stability,the influence of external optical feedback intensity on inclination of the interference signal，and the specialty of the interference signal with different rnicrovibration waveforills． (2)The nonlinear least squares method is used to estimate the external optical feedback intensity and linewidth etthaneetnent factor,which are needed in the reconstruction measurement method． (3)The reconstruction measurement method is simulated．Two curTent main measurement methods which are fid_nge counting method and phase analysis method are also simulated．Compared with the current mian measurcnlent 西南交通大学硕士研究生学位论文 西南交通大学硕士