光栅光阀新结构的光学性能分析【毕业论文】.doc

- PAGE I - 本科毕业设计 （20 届） 光栅光阀新结构的光学性能分析 所在学院 专业班级 电子信息科学与技术 学生姓名 学号 指导教师 职称 完成日期 年 月 PAGE I 摘　要 【摘要】光栅光阀是一种基于MEMS技术的衍射光器件，在投影成像、打印以及光通信等领域获得了广泛的应用。光栅光阀发展到今天历经了三代结构的变化，本文通过对三代光栅光阀不同结构的比较，在第三代结构的基础上自主的提出了光栅光阀新结构，详细分析了光学参数对光栅光阀光学性能的影响，并通过模拟计算验证了光学参数与光学性能之间的关系，为以后光栅光阀的工艺制作提供了理论指导。 【关键词】光栅光阀；衍射光栅；光学性能；MATLAB模拟计算。 PAGE III Abstract 【ABSTRACT】Grating Light Valve is a MEMS-based diffractive optical devices, and it has a wide range of applications in projection imaging, printing, optical communications and other fields.Grating Light Valve has changed in the structure of three generations since it was generated. The different structures of three generations of Grating Light Valve are campared, and a new structure of the Grating Light Valve is proposed independently based on the third generation of structure. We detailedly analysize the optical parameters of the Grating Light Valve and its effects to the optical properties, also, through the simulation the relationship between the optical properties and the optical parameters of the Grating Light Valve is verified. This work provides a theretical instruction the the fabrication of the Grating Light Valve in the future. 【KEYWORDS】Grating Light Valve；Diffraction Grating；Optical Properties；MATLAB Simulation 目　录 TOC \o 1-3 \h \z \u HYPERLINK \l _Toc293646260 摘　要 PAGEREF _Toc293646260 \h II HYPERLINK \l _Toc293646261 Abstract PAGEREF _Toc293646261 \h III HYPERLINK \l _Toc293646262 目　录 PAGEREF _Toc293646262 \h IV HYPERLINK \l _Toc293646263 1 绪论 PAGEREF _Toc293646263 \h 1 HYPERLINK \l _Toc293646264 1.1 光栅光阀简介 PAGEREF _Toc293646264 \h 1 HYPERLINK \l _Toc293646265 1.2 研究背景及历史现状 PAGEREF _Toc293646265 \h 1 HYPERLINK \l _Toc293646266 1.3 光栅光阀的应用 PAGEREF _Toc293646266 \h 3 HYPERLINK \l _Toc293646267 1.4 研究内容及课题意义 PAGEREF _Toc293646267 \h 4 HYPERLINK \l _Toc293646268 1.5 本文结构 PAGEREF _Toc293646268 \h 4 HYPER