硅基微驱动器的建模与分析-仪器仪表工程专业论文.docxVIP

Abstract As an important part of MEMS, micro actuator has attracted widespread attention of overseas and domestic regions in recent years. At present, the problems of high driving voltage and small deformation that generally exist in micro actuator reduce the scope of its application. Contraposing the disadvantages, the paper presents a micro actuator based on silicon with low driving voltage and large deformation which can be applied to micro devices, such as MEMS optical switch, microresonato r, RF switch, micropump, microgyroscope, programmable granting, phased array antenna and so on. The paper mainly includes the following content. Based on the principles of MEMS technology, vertically and horizontally bending, buckling of columns, and electrostatic actuation, the straight beam and folding beam structural micro actuator models based on silicon are designed, and the structure size of micro actuator is set. According to the deformation analysis of vertical and horizontal bending micro actuator ,the discussion of axial forces composition and related calculation, dynamic model is established. A static analysis is performed on the micro actuator. the approximate analytical method and numerical method are used to solve different forms of static equations. The simulation analysis of the models is achieved by using Matlab software. The deflection curve of micro actuator which has two kinds of structure under different driving voltage and the relation of driving voltage with deformation are ac hieved. Micro actuator simulation of two kinds of structure are analysed,the results show that the deformation of the straight beam and the folding beam structural micro actuator are respectively 10.861μm and 11.13μm when the driving voltage is only 16V. Dynamic analysis is made for the micro actuator based on silicon. The dynamic response of the micro actuator under different loads are calculated and analyzed by using modal superposition method and numerical method respect