课件：WAInroducion.ppt

Watch Rule-DH Default Defined Rule : “5” rule type DH Rule1 : (1)Wafer Pass/Fail Check : If any key parameter in one site fail; the site fail. Criteria If the failure sites within greater or equal than 3; the wafer is fail.(Scarp/Retest criteria) (2)Lot Hold/Release Check : If the wafer fail pcs from (1) =1 ? Hold DH Rule2 : For key parameter like “VBD$” or “Vbd$” ; Any site fail within wafer ? Hold DH Rule3 : Any key parameter OOS and OOV site rate 10% then this lot fail. DH Rule4 : Any site whole parameter fail rate 25% then this lot fail. DH Rule5 : For key parameters count in raw data is same with limit file DH Rule6 : For key parameters and sites count in last raw data is same with previous data per wafer. Watch Rule-PH PARAMETER HOLD Rule : “User define”  PH Rule1 (X/5): By wafer ,For each parameter data you select,if fail site number of each wafer is larger than or equal tot X; Rule1 check fail. PH Rule2 (X/125): By Lot ,For each parameter data you select,if fail site number of the whole lot is larger than or equal tot X; Rule2 check fail. PH Rule3 (X/25): By Site ,For each parameter data you select,if fail site number of the whole lot is larger than or equal tot X; Rule3 check fail. Mostly, The WAT Parameter Naming Use This Type: If Need. Sample: Use Logic Device WAT 11 VTI Test Items as sample. WAT Parameter Naming Rule 1. MOSFET Transistor’s Naming WAT Parameter Naming Rule 2. MOSFET Capacitor WAT Parameter Naming Rule 3. Field Transistor 4. Junction Diode WAT Parameter Naming Rule 5. Sheet resistance WAT Parameter Naming Rule 6. Contact (via, stack via) resistance WAT Parameter Naming Rule 7. Poly metal continuity 8. Salicide Bridge WAT Parameter Naming Rule 9. Intra-Isolation 10. Inter-Isolation WAT Parameter Naming Rule 11. PIP, MIM and metal interconnect capacitors 12. Vert