TEM用语集-样品等样品及制样.pdf

TEM 用语集- 样品等（样品及制样） 1．ion etching keyword “ ion etching ” Ion etching is a technique to selectively remove specific atoms and the atoms at lattice defects. This technique is used for observation of textures on a specimen surface. A technique of uniform and nonselective thinning for specimen preparation of TEM is ion milling. Sometimes, ion etching is confused with ion milling. Related term ion milling 2. ion cleaner keyword “ion cleaner ” An ion cleaning tool that removes contaminants on a TEM specimen, which are residual substances deposited on a specimen at specimen pre-treatment, and contaminated substances deposited on a specimen in specimen storage. The specimen holder on which a specimen is set is inserted into an ion cleaner. Then, a glow discharge due to residual gasses in the ion cleaner is generated and the ionized gasses by discharge irradiate the specimen. This chemical-reaction of the ionized gasses removes the contaminants (in particular, polymerized substances of hydrocarbons) deposited on the specimen. Related term contamination plasma cleaning 3. ion sputtering keyword “ion sputtering ” Ion sputtering is a phenomenon where atoms are sputtered from a solid surface when ionized and accelerated atoms or molecules hit the solid surface. This phenomenon is utilized for formation of a thin film on a solid surface, specimen coating and ion etching. In the case of specimen coating, discharge is generated in a low vacuum or in an Ar gas environment under a vacuum, the ionized gas is accelerated and hits a target material (Au, Pt, etc.) at the anode. Then, the material is emitted from the target surface and deposit on a specimen at the cathode, specimen being coated. Related term focused ion-beam milling FIB 4-1