二焊点摩擦的调试ASM.ppt

2nd bond multi-stage introduction * ASM Pacific Technology Ltd. ? 2009 page * Background Background The current bonding structure is base on the standard bonding flow Search – enhancer – contact – scrub – base – release - tail The disadvantages of current structure Unable to add scrub at each stage Unable to switch from force control to position control during 1st bond and 2nd bond This structure is not flexible for further requirement * ASM Pacific Technology Ltd. ? 2009 page * 2nd Bond Multi Bond Stages – Features Maximum 6 Bond Stages are supported in each wire 2nd bond group. Auto convert old Scrub control Parameters to Multi Bond Stages Scrub control Parameters New parameters added Bond Stage Selection Scrub Control Mode Scrub Delay Scrub Bond Time – user can key in scrub bond time if scrub cycle is set to 0 BH move distance BH move speed factor BH touch down speed factor BH touch down tolerance factor BH touch down control * ASM Pacific Technology Ltd. ? 2009 page * Bond Stages Selection Setting Interface View All Bond Stages Scrub Disabled Some Bond Stages Scrub Enabled All Bond Stages Scrub Enabled * ASM Pacific Technology Ltd. ? 2009 page * Scrub Control Mode Setting Interface View Z-Scrub is only available to Pre Ctact, Pre Base and Pre Release stages. User can configure SPC1, Scrub and SPC2 are applied with force control or position control by adjust the below one parameter. BH Touch Down Control * ASM Pacific Technology Ltd. ? 2009 page * BH Move Control for Z scrub After SPC2 Before SPC2 With Scrub Before Scrub Before SPC1 BH move up Before SPC1 Touch Down BH move up always before SPC1 BH Touch Down Control has 5 options as below SPC1 Scrub SPC2 * ASM Pacific Technology Ltd. ? 2009 page * Multi Bond Stages – parameters -1 New parameters added Scrub Delay -ms User can set a delay time before scrub start, normally applied if force changes from high to low Scru